Innovative X-ray optics for micro XRF applications

Unlocking precision with micro XRF technology

Micro X-ray fluorescence (µXRF) is a non-destructive technique for highly localized elemental analysis, ideal for examining minute sample areas and features inaccessible by conventional XRF.

By utilizing polycapillary and DCC focusing optics, µXRF systems generate tightly focused, high-intensity X-ray beams, achieving spatial resolution as fine as 10 µm and overcoming the sensitivity limitations of traditional XRF and pinhole collimators.

This enables detailed mapping, identification, and quantification of elements in small regions of interest, making µXRF particularly effective for applications such as:

• Semiconductors and electronics
  µXRF enables precise mapping of layer thickness, identification of micro-contamination, and verification of composition in advanced electronic components and microcircuits. This makes it an essential tool for quality control and failure analysis.
• Materials science
  With its ability to characterize inclusions, evaluate coating uniformity, and study elemental distribution, µXRF is widely used in the analysis of alloys, composites, and advanced materials. The tightly focused, high-intensity X-ray beams of µXRF enable detailed microstructure analysis, supporting efforts to optimize material consistency and performance.
  
• Forensics and art conservation
  Because µXRF is non-destructive, it’s invaluable for detecting trace evidence such as gunshot residue, authenticating artwork, and analyzing pigments or contaminants in heritage objects. It provides detailed insights without damaging delicate or irreplaceable samples.