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Polycapillary Optics
Polycapillary X-ray Optics to improve X-ray analysis performance and capability.
A polycapillary optic captures a large solid angle of X-rays from an X-ray source and redirects them to a micron-sized focal spot or a highly collimated beam. The X-ray intensity achieved with such optics is a few orders of magnitude higher than that obtained with conventional pinhole collimators, contributing to the significantly improved X-ray analysis performance in detection sensitivity, spatial resolution, measurement speed, and precision. XOS optics are widely used in commercial instruments and customized X-ray analysis systems for various industrial and research applications in the fields such as microelectronics, semiconductor manufacturing, pharma, and life sciences.
Features
• X-ray flux density gain up to 10,000 times greater than conventional pinhole collimator
• Focal spot as small as 5µm
• Broad spectral bandwidth: 10eV-50keV
Benefits
• Significantly improved measurement speed for fine-feature analysis and high-resolution mapping
• Halo reduction optics optimized for high-energy applications
• Large, quasi-parallel X-ray beam for XRD and XRF
• Customized optic design for optimal performance
Applications
• Micro-XRF for elemental mapping, plating thickness, and fine feature analysis
• Confocal XRF analysis and wavelength-dispersive spectrometer (WDS)
• Synchrotron-based micro X-ray analysis (Micro-XRF, micro-XAS and confocal XRF)
• Powder XRD, texture and stress analysis
